Elastic mapreduce cluster always in this status: Provisioning Amazon EC2 capacity

When I create an elastic mapreducer cluster, within a created vpc, is always showing this message:

Provisioning Amazon EC2 capacity

After more than 30 minutes I get an error:

Failed to start the job flow due to an internal error

Im trying to find where the issue is but without sucess, so I came here to ask to see if you can help me.

I will explain all the steps that I did to create the vpc and subnets that Im using in my elasticmapreducer cluster:

1º Create VPC:

Name Tag: elasticVPC
CIDR block: 10.0.0.0/16
Tenancy: Default

2º Create Subnets (one in each Availability Zone):

Name Tag: subnet1
VPC: elasticVPC
Availability Zone:  us-east-1b
CIDR BLOCK: 10.0.0.0/24

Name Tag: subnet2
VPC: elasticVPC
Availability Zone:  us-east-1c
CIDR BLOCK: 10.0.1.0/24

Name Tag: subnet3
VPC: elasticVPC
Availability Zone:  us-east-1d
CIDR BLOCK: 10.0.2.0/24

Name Tag: subnet4
VPC: elasticVPC
Availability Zone:  us-east-1e
CIDR BLOCK: 10.0.4.0/24

3º Create Route Table Name Tag: elasticRT VPC: elasticVPC

4º Create Internet Gateway Name Tag: elasticIG Attach this IG to VPC elasticVPC

5º Route tables -> routes -> edit -> add another route Destination: 0.0.0.0/0 Target: igw...(elasticIG)

6º Route tables -> subnet associations -> select all subnets to associate

Then to create the elastic mapreducer cluster:

In Network I selected the created vpc, and in EC2 Subnet I selected one created subnet.

In Steps, I selected StreamingStep, selected the mapper, reducer, input and output and then I create in create cluster.

And I have always "Provisioning Amazon EC2 capacity"